How to choose an oil-free lubricated air compressor for semiconductor etching process
Semiconductor manufacturing industry background
In the semiconductor etching process, compressed air must reachISO 8573-1 Class 0Oil-free standard (oil content ≤0.001mg/m³), and meetsSEMI F5-0202EStrict requirements for gas purity. in3nm processIn, the particulate matter concentration of compressed air must be ≤0.01/m³ (≥0.1μm particle size, according to ISO 14644-1 Class 1 standard), and the material outgassing rate is <5×10 ³ g/cm²·s (passedASTM E595testing). With the 2023 **SEMI S23-0816 Guide to Compressed Gas Systems for Semiconductor Equipment ** update, compressors are also required to meet 100% inert gas compatibility (e.g. NF3, C4F8).
Why does semiconductor etching require oil-free lubricated air compressors
Irreplaceable:
- Zero pollution risk: Water lubrication technology completely eliminates the source of oil mist pollution (certified by ISO 8573-1 Class 0) and avoids abnormal defects in the photoresist layer.
- process stability: The double closed-loop water circulation system ensures that exhaust temperature fluctuations are ≤±0.3℃ (in compliance with SEMI E10-0309 dynamic control standard).
- material compatibility: 316L stainless steel runner combined with EPDM seals passed SEMI F57-0312 chemical compatibility testing.
Selection of semiconductor core parameters
Key indicators and testing standards:
- dew point control: ≤-70℃ (ISO 8573-2:2018 Pressure dew point test)
- vibration suppression: ≤1.2mm/s (VDI 2083 Clean Room Equipment Vibration Specification)
- Particulate matter control: ≥0.1μm particles ≤0.01 particles/m³ (ISO 14644-1 Class 1)
- Anti-static ability: Surface resistance ≤1×10 Ω (IEC 61340-5-1 electrostatic protection standard)
Potential risks of not using oil-free lubricated air compressors
- yield loss: Oil mist contamination causes a 0.5-1.2% increase in wafer defect rate (based on SEMI M49-0318 data model).
- equipment downtime: Lubricating oil is carbonized and clogging gas lines (ASTM F838-15 filter integrity test failed).
- Process out of control: Temperature fluctuations cause etch rate deviations ≥3%(SEMI E10-0309 process stability standard).
Economic benefits of using oil-free lubricated air compressors
- maintenance costs: Water-lubricated systems reduce filter replacement frequency by 95%(IEC 60034-1 Durability Test).
- energy consumption optimization: Heat recovery system improves energy efficiency by 0.12kW/m³ (certified by ISO 50001).
- Improved yield: Clean gas supply increases wafer yield by 0.8-1.5%(SEMI benchmark data).
Comparison table of oilless compressors vs oilless compressors in semiconductor manufacturing
| comparative dimension | Oil-water lubricated air compressor | oily air compressor | testing standards |
|---|---|---|---|
| oil content | ≤0.001mg/m³ | 0.5-2mg/m³ | ISO 8573-1 Class 0 |
| Particulate matter control | Class 1 Cleanliness | Class 5-7 Cleanliness | ISO 14644-1 |
| temperature stability | ±0.3℃ fluctuations | ±2℃ fluctuations | SEMI E10-0309 |
| material outgassing rate | <5×10⁻¹⁰ g/cm²·s | >1×10⁻⁸ g/cm²·s | ASTM E595 |
summary
Shanghai Granklin Group adopts oil-free compression technology that meets international standards. Its oil-free lubricating air compressor has passed SEMI S2/S8 certification and NFPA 99 medical gas standard, providing clean air protection from etching to deposition for 3nm advanced processes. As the semiconductor industry breaks through the limits of Moore’s Law, oil-free technology has become the core infrastructure to ensure process stability and yield.
